, , ,

EVG 101 wafer resist / wafer Advanced spin coating computer EKF System EVG 150


1 in stock


1 in stock

EVG 101 wafer resist / wafer Advanced spin coating computer only complete EKF System 

The EVG 101 wafer resist/ wafer advanced spin coat processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated system. The process is developed in an EVG 101 system on 300mm wafers. Parameters of the spin process such as resist solution, nozzle scanning speed, and dispense rate have been studied to find out the proper process for the application of through-wafer interconnects.

EVG sophisticated Omni Spray coating technology is able to achieve conformal layers of polymers or photoresists on 3D structured wafers. This allows minimized material consumption of valuable high viscosity polymers or photoresists and also improves resist spreading options and uniformity.


Brand/Company: EVG Group / EKF system

Model: EVG 101 wafer spin coating

Wafer size: up to 300 mm

Condition: Tested and in working condition


  • Quick and easy process transfer from research to production utilizing proven modular design and standardized software.
  • Automated spin or spray coating or developing with manual wafer load/unload.
  • Small footprint while maintaining a high level of personal and process safety.
  • Syringe dispense system for utilizing small resist volumes, including high-viscosity resists.
  • Multi-users concept (unlimited number of user accounts and recipes, assignable access rights, different user interface languages)
  • Options:
  1. Uniform coating of high-topography wafer surfaces with Omni Spray coating technology.
  2. Spin-On-Glass (SOG) coating
  3. Wax and epoxy coating for successive bonding processes

loaded software’s / tools EVG 150, WMEMOC 

Microsoft Windows 2000 Installed
Ekf Electronik GmbH CR3-90RACK
Hardware Installed
Embedded Single Board Computer Pentium III EKF cc5-RAVE R2 1.18 chipset Intel 810E
XMP Motion Controller 
Intelligent Dual CAN2.08 Fieldbuss adapte CX1-Band
Intelligent Serial 4 Port
SE1000031 CPR02 Can Port
SE100003 CO321 32xout
CompactPCI EKF system CX1 Band
CompactPCI EKF system CU2 Quartet 
CompactPCI EKF system CC5 RAVE
CompactPcI EKF system CC6 ACID
mei Motion engineering Inc. XMP M MAIN-8-24V Rev. 4
**Shipping quote is tentative only, we will recalculate once we know delivery destination. Buyer also welcome to appoint their won forwarding agent.
**Incas if buyer decided to arrange their own forwarding agent we only charge Packaging/admin. and handling fee.

Condition and Details:

This is a used item in normal  condition and working pull
during dismateling from machine cables have been cut, buyer have to figure-out themselves to rework cables/harness.

Not In Original Packing

No Accessories / Cable or probe (only what showing into actually given pictures and in description).

Old Stock. No Software CD/Disk.  No Driver CD/Disk.

Any software / driver pre-loaded only.


Usually, we ship same business day, subject to clear funds into our account 

Standard order processing time is 5 business days 

Item will be packed as per International Standard, 

International Orders: DHL / SingPost/EMS

* Expedited shipping is available for an extra fee.

* International buyers pay all custom, duties, taxes & brokerage fees at their end.

Warranty and Returns:


30 DAYS Money Back or Replacement, buyer pays return shipping

Product Returns:

Return to Base Warranty, Any type of power failure/burn / physical damage / tempered seal will void the warranty.

Within warranty period item return buyer has to pay for return shipping.
We will refund the full amount to buyer including original shipping which buyer already paid, or in case of replacement, we will pay for shipping for sending back the replacement.


Payment Methods:


Credit Cards  

Wire-transfer: Kindly contact us for payment instructions

International buyers without PayPal: Kindly contact us before bidding

About Us:

We deal in Semiconductor & Wafer Handling Parts/Components/machinery and types of equipment. A Verity of Industrial Automation Equipment and Parts.

Industrial PCs, PLCs, HMI, Controllers and Sensors.

Industrial robotics, Data Acquisition and Test & Measurement.  

Industrial Single Board Computers.

Marine Parts / Equipment’s.

Oil & Gas and offshore station.

Lab and Research Equipments.

We Source, We refurbish, We Service and We also Repair …please contact for any further detailed inquiries.

Based on 0 reviews

0.0 overall

Be the first to review “EVG 101 wafer resist / wafer Advanced spin coating computer EKF System EVG 150”

There are no reviews yet.